Abstract:
The use of laser trimming techniques with conventional CMOS processes requires thorough understanding of the electrical consequences of a laser pulse on surrounding sensi...Show MoreMetadata
Abstract:
The use of laser trimming techniques with conventional CMOS processes requires thorough understanding of the electrical consequences of a laser pulse on surrounding sensitive devices. A study on the laser-induced photoexcitation effect on a ring-oscillator has been performed. Experiments are performed with a laser beam focused on a diffusible resistor made of a n-doped gap between two highly p-doped regions. An in-situ characterization technique has been used to get the laser's power profile under dielectric layers. A novel frequency-monitoring circuit is presented. It has been manufactured in 0.18 /spl mu/m CMOS technology and experimental results are presented. It has been measured that the laser causes a 28% change of the oscillating frequency. An approach to model the photoexcitation effect using combined electrical and physical simulations is presented.
Date of Conference: 23-26 May 2005
Date Added to IEEE Xplore: 25 July 2005
Print ISBN:0-7803-8834-8