Abstract:
We describe a potentiostat designed for in situ electrochemical control of MEMS actuators. This module is tailored for integration into a hybrid CMOS-MEMS system-on-a-chi...Show MoreMetadata
Abstract:
We describe a potentiostat designed for in situ electrochemical control of MEMS actuators. This module is tailored for integration into a hybrid CMOS-MEMS system-on-a-chip to confine cells and measure signals from them. The design has been fabricated in a commercially available 0.5 mum CMOS process. The fabricated chip has been employed for the control of off-chip electroactive polymer films and micro-actuators
Date of Conference: 21-24 May 2006
Date Added to IEEE Xplore: 11 September 2006
Print ISBN:0-7803-9389-9