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A phase-noise model for nonlinear piezoelectrically-actuated MEMS oscillators | IEEE Conference Publication | IEEE Xplore

A phase-noise model for nonlinear piezoelectrically-actuated MEMS oscillators


Abstract:

This paper presents a new empirical exponential-series-based model that describes the measured phase-noise (PN) of a nonlinear piezoelectric MEMS oscillator. Since the or...Show More

Abstract:

This paper presents a new empirical exponential-series-based model that describes the measured phase-noise (PN) of a nonlinear piezoelectric MEMS oscillator. Since the order of terms in the Leeson's model can only provide at maximum -30 dB/dec slope, a model with higher order terms is proposed to determine an effective resonator quality factor (Qeff) and reflect the reduced contribution of the amplifier flicker-noise. The average fitting error of the proposed model to a 23 MHz in-plane shear (IPS) mode oscillator is found to be less than 1%. Nonlinear operation produces an oscillator with a PN of -130 dBc/Hz at 1kHz offset-frequency, which corresponds to an improvement of about 15 dB compared to linear operation.
Date of Conference: 15-18 May 2011
Date Added to IEEE Xplore: 04 July 2011
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Conference Location: Rio de Janeiro, Brazil

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