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Programmable electrohydrodynamic jet printed gas sensor on MEMS micro-hot plate platforms | IEEE Conference Publication | IEEE Xplore

Programmable electrohydrodynamic jet printed gas sensor on MEMS micro-hot plate platforms


Abstract:

MEMS gas sensors, with the advantages of miniaturization, low power consumption and easy integration, are attractive for electronic noses (E-noses) systems. Here, program...Show More

Abstract:

MEMS gas sensors, with the advantages of miniaturization, low power consumption and easy integration, are attractive for electronic noses (E-noses) systems. Here, programmable electrohydrodynamic jet printing is presented to direct deposit colloidal tungsten oxide (WO3) nanocrystal onto MEMS micro-hot plate platform without any mask. The sensors is tested for their ability to distinguish three different gases (NO2, H2S and ethanol), and the sensor is selective and sensitive toward NO2 gas, with a response of 210 towards 10 ppm NO2 at 120 °C. The results of this paper pave the way to a useful strategy for making low cost, high performance metal oxide-based E-nose chips.
Date of Conference: 26-29 May 2019
Date Added to IEEE Xplore: 05 September 2019
ISBN Information:
Conference Location: Fukuoka, Japan

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