Abstract:
This paper describes a sensitive method for particle sensing using a high-order membrane resonator operating at 9.5 MHz. The design makes use of AIN piezoelectric film wi...Show MoreMetadata
Abstract:
This paper describes a sensitive method for particle sensing using a high-order membrane resonator operating at 9.5 MHz. The design makes use of AIN piezoelectric film with a supported disk geometry to provide isolation of the electrical contacts. The frequency shifts measured with known particle deposition are based on a thermophoretic separator. The particle mass flux calculation using the thermophoretic separator are 4.98 \times 10^{-8} and 8.24 \times 10^{-8} \mathrm{mg} / \mathrm{mm}^{2} which was achieved at 50 °C and 70 °C respectively. The sensitivity observed for 50-200 nm diameter particles was 0.9 Hz frequency shift correlating to a 69 fg mass change at 50 °C, and a 1.2 Hz frequency shift correlating to a 92 fg mass change at 70 °C, compared to a theoretical mass sensitivity of 13Hz/pg.
Date of Conference: 12-15 May 2024
Date Added to IEEE Xplore: 18 June 2024
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