Programmable-logic cell that utilizes complementary atom switch (CAS) is fabricated using 65-nm node CMOS process. A 16-bit ALU is implemented and demonstrated on a 24×24 programmable-logic cell array including 645kbit CAS for both routing switches and configuration memories. Comparing the conventional cell design using CMOS routing multiplexer (MUX), the proposed programmable-logic cell array performs 60% active power saving and 3 times faster operation.