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A compact CMOS MEMS microphone with 66dB SNR | IEEE Conference Publication | IEEE Xplore

A compact CMOS MEMS microphone with 66dB SNR


Abstract:

Silicon MEMS microphones that offer small size, ease of integration with CMOS electronics, and the ability to withstand lead-free solder reflow cycles, are becoming incre...Show More

Abstract:

Silicon MEMS microphones that offer small size, ease of integration with CMOS electronics, and the ability to withstand lead-free solder reflow cycles, are becoming increasingly popular for high-volume consumer electronic products, and are competing in price and performance with traditional electret condenser microphones [1]. The design of a MEMS microphone, consisting of a compliant membrane and a stiff back-plate forming a variable capacitor, is a challenging task with a number of design trade-offs [2]. For cost reasons, a small-area membrane is desired; however, lower acoustical noise is obtained with a larger membrane. In this work, we demonstrate a method to increase the SNR of a microphone system without the need for a complicated and risky MEMS die redesign. An SNR of 66dB is achieved using two microphones (instead of a single one) in a differential configuration, thus doubling the total membrane area.
Date of Conference: 08-12 February 2009
Date Added to IEEE Xplore: 29 May 2009
Print ISBN:978-1-4244-3458-9

ISSN Information:

Conference Location: San Francisco, CA, USA

References

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