CMOS sensors using nanomaterials on the surface are very effective for early detection of diseases. Among the nanomaterials, carbon nanotube (CNT) is an ideal biosensor material since it has a small diameter (∼1nm) directly comparable to the size of biomolecules and excellent electrical characteristics. Because CNT is formed chemically in a special environment, to use it in a CMOS process, many electrodes are formed as an array and the CNT solution is coated on the electrode array. However, to prevent electrical shorts between bonding pads, very complicated area-selective CNT coating processes are required. Furthermore, chip packaging steps — such as wire bonding, chip passivation against reactions to the wire, microfluidic channels on the chip, etc. — should be carefully applied [1].