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A 0.5-ms 47.5-nJ Resistor-to-Digital Converter for Resistive BTEX Sensor Achieving 0.1-to-5 ppb Resolution | IEEE Journals & Magazine | IEEE Xplore

A 0.5-ms 47.5-nJ Resistor-to-Digital Converter for Resistive BTEX Sensor Achieving 0.1-to-5 ppb Resolution


Abstract:

This article presents an energy-efficient resistor-to-digital converter (RDC) intended for use in a gas sensor system to detect harmful benzene, toluene, ethyl-benzene, a...Show More

Abstract:

This article presents an energy-efficient resistor-to-digital converter (RDC) intended for use in a gas sensor system to detect harmful benzene, toluene, ethyl-benzene, and xylene (BTEX) compounds. The sensor is based on a resistive micro-electromechanical systems (MEMS) sensor, whose selectivity is tuned by different heating levels of micro-heater, allowing a single sensor to detect multiple gases. To achieve both high resolution and energy efficiency, the sensor’s output current is digitized by a continuous-time (CT) delta–sigma ( \Delta \Sigma ) RDC. It combines the bias circuit for the sensor and the RDC’s first integrator, and then, its charge balancing between the sensor resistor and the 16-level feedback resistive digital-to-analog converter (RDAC) allows the use of a low bias current. Fabricated in the 110-nm CMOS process, the prototype RDC achieves an 18.8-bit resolution in a resistance range from 20 \text{k}\Omega to 500 \text{k}\Omega . The sensor system is validated through a transient response of BTEX and a principal component analysis (PCA). It achieves 0.1-to-5-ppb gas resolution in the BTEX concentration range of 9 ppm with a measurement time of 0.5 ms, while consuming 95 \mu \text{W} from a 1.5-V supply. This corresponds to an energy consumption of 47.5 nJ.
Published in: IEEE Journal of Solid-State Circuits ( Volume: 58, Issue: 3, March 2023)
Page(s): 827 - 837
Date of Publication: 25 August 2022

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