A rapid virtual prototype synthesis method for MEMS devices based on element model library and metamodel is proposed in this paper. The goal of the approach is to help designers to establish virtual prototypes of new MEMS devices and find the optimal parameters in a short time. In the proposed method, the virtual prototype is established by connecting reusable and parameterized element models in a Multi-Port-Element-Network element model library. The optimal parameters are obtained based on the metamodel derived by uniform design and regression method. The design processes of two typical MEMS devices-micro gyroscope and micro resonator are presented for demonstrating the convenience of the new methodology. The proposed method provides designers a faster way of prototyping of new MEMS devices that is especially advantageous in the early stage of design.