Loading [a11y]/accessibility-menu.js
Structure-decoupled dual-mass MEMS gyroscope with self-adaptive closed-loop detection | IEEE Conference Publication | IEEE Xplore

Structure-decoupled dual-mass MEMS gyroscope with self-adaptive closed-loop detection


Abstract:

The dual-mass double-linear vibrational gyroscopes are insensitive to the environment, and their differential outputs can effectively suppress the common mode interferenc...Show More

Abstract:

The dual-mass double-linear vibrational gyroscopes are insensitive to the environment, and their differential outputs can effectively suppress the common mode interference. A structure-decoupled dual-mass MEMS(micro-electro-mechanical system) gyroscope is studied in this paper, which can realize the full decoupling of the driving mode and sensing mode. In order to improve the performance of the dual-mass MEMS gyroscope, a self-adaptive closed-loop detection method is developed. This method tunes the sensing-mode frequency to driving-mode frequency, achieves the driving and sensing modes matching, regulates the amplitudes of the sense axis to a constant value. The results of simulation and experiment indicate this self-adaptive closed-loop detection method makes the sensing mode oscillate in a given frequency and the amplitude to a fixed value for dynamic range and precision improvement. This detection method achieves translational acceleration elimination, cancels out quadrature error, improves the gyro's total performances and achieves the ideal design purpose.
Date of Conference: 20-23 January 2010
Date Added to IEEE Xplore: 30 September 2010
ISBN Information:
Conference Location: Xiamen, China

Contact IEEE to Subscribe

References

References is not available for this document.