Abstract:
In this paper, we propose and demonstrate a novel micro-mirror array. The Micro-mirror structure with terraced electrodes was simulated with the aid of CoventorWare and t...Show MoreMetadata
Abstract:
In this paper, we propose and demonstrate a novel micro-mirror array. The Micro-mirror structure with terraced electrodes was simulated with the aid of CoventorWare and the simulation results show that the micro-mirror can obtain a required tilted angle. Si-Si bonding technology is used for fabricating the Micro-mirror array and an array with high Fill factor of 97% has been achieved.
Date of Conference: 20-23 January 2010
Date Added to IEEE Xplore: 30 September 2010
ISBN Information:
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