Loading [a11y]/accessibility-menu.js
High performance MEMS spiral inductors | IEEE Conference Publication | IEEE Xplore

High performance MEMS spiral inductors


Abstract:

In this paper, fabrication and performance of RF MEMS planar spiral inductors is presented. The fabrication process is simple, using surface micromachined technology with...Show More

Abstract:

In this paper, fabrication and performance of RF MEMS planar spiral inductors is presented. The fabrication process is simple, using surface micromachined technology with three masks. Two types of spiral inductor were fabricated and the measured results showed that the spiral inductors had high performance at high frequency. The maximum quality of the spiral inductor-Type A is 15.8 at 1.4 GHz with inductance of 4.61 nH. The maximum quality of the spiral inductor-Type B is 19.7 at 4.1 GHz with inductance of 1.40 nH.
Date of Conference: 20-23 January 2010
Date Added to IEEE Xplore: 30 September 2010
ISBN Information:
Conference Location: Xiamen, China

References

References is not available for this document.