Loading [a11y]/accessibility-menu.js
Zernike representation of angle-resolved Mueller matrix for dimensional analysis of nanoscale structures | IEEE Conference Publication | IEEE Xplore

Zernike representation of angle-resolved Mueller matrix for dimensional analysis of nanoscale structures


Abstract:

The angle-resolved Mueller matrix polarimetry has been recently introduced for dimensional metrology of nanoscale structures. Due to the redundant information contained i...Show More

Abstract:

The angle-resolved Mueller matrix polarimetry has been recently introduced for dimensional metrology of nanoscale structures. Due to the redundant information contained in the measured Mueller matrix, it is difficult to find the implicit relationship between the geometrical parameters of the structure and the elements of the Mueller matrix. In this paper, a novel method based on Zernike representation is proposed to simplify the analysis of the angle-resolved Mueller matrix. The simulation results have demonstrated that the Zernike coefficients can be applied as useful metrics for dimensional analysis of nanoscale structures.
Date of Conference: 20-23 February 2011
Date Added to IEEE Xplore: 12 September 2011
ISBN Information:
Conference Location: Kaohsiung, Taiwan

References

References is not available for this document.