Pulse mode actuation-readout system based on MEMS resonator for liquid sensing | IEEE Conference Publication | IEEE Xplore

Pulse mode actuation-readout system based on MEMS resonator for liquid sensing


Abstract:

A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated f...Show More

Abstract:

A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%.
Date of Conference: 13-16 April 2014
Date Added to IEEE Xplore: 25 September 2014
Electronic ISBN:978-1-4799-4726-3
Conference Location: Waikiki Beach, HI, USA

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