Abstract:
A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated f...Show MoreMetadata
Abstract:
A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%.
Published in: The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Date of Conference: 13-16 April 2014
Date Added to IEEE Xplore: 25 September 2014
Electronic ISBN:978-1-4799-4726-3