Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems | IEEE Conference Publication | IEEE Xplore

Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems


Abstract:

In this paper we present a holistic wafer-level manufacturing process for nanoscopic sensor devices based on individualized single-wall carbon nanotubes (SWCNTs) integrat...Show More

Abstract:

In this paper we present a holistic wafer-level manufacturing process for nanoscopic sensor devices based on individualized single-wall carbon nanotubes (SWCNTs) integrated in MEMS. The fabrication technology is demonstrated in detail. Moreover, a first application in form of a MEMS test stage for SWCNT strain and reliability experiments is shown.
Date of Conference: 17-20 April 2016
Date Added to IEEE Xplore: 01 December 2016
ISBN Information:
Conference Location: Sendai, Japan

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