Abstract:
In this work, nanowire forests are fabricated by using a plasma repolymerization technique. The fabrication process involves only spin-coating of polyimide and plasma bom...Show MoreMetadata
Abstract:
In this work, nanowire forests are fabricated by using a plasma repolymerization technique. The fabrication process involves only spin-coating of polyimide and plasma bombardment of the polymer, the whole process is lithography-free, micromachining-compatible and extra simple. Besides, the nanowire forests can further be utilized as nanomasks in reactive ion etching for nanopillar-nanowire composite forests. Optical features of nanowire forests and nanopillar-nanowire composite forests in different wavelength regions are investigated. The high transraittance of nanowire forests in visible-light range implies applications of the forests in transparent devices. Composite forests with a special absorptance peak in range of 8-10 μm implies broader applications of the nanoforests in infrared devices for specific substance sensing.
Published in: 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Date of Conference: 09-12 April 2017
Date Added to IEEE Xplore: 29 August 2017
ISBN Information:
Electronic ISSN: 2474-3755