Abstract:
This paper presents an electrochemical seismometer with parylene based microelectrodes for detecting micro seismic signals. Compared to silicon based counterpart, parylen...Show MoreMetadata
Abstract:
This paper presents an electrochemical seismometer with parylene based microelectrodes for detecting micro seismic signals. Compared to silicon based counterpart, parylene based microelectrodes can effectively decrease the thickness of the insulating layer, which contributes to the increase in sensitivity and decrease in cost. The proposed electrochemical seismometer was designed, fabricated and characterized, producing a sensitivity of one order higher than silicon based counterpart.
Published in: 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Date of Conference: 09-12 April 2017
Date Added to IEEE Xplore: 29 August 2017
ISBN Information:
Electronic ISSN: 2474-3755