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High-sensitivity electrochemical seismometers relying on parylene-based microelectrodes | IEEE Conference Publication | IEEE Xplore

High-sensitivity electrochemical seismometers relying on parylene-based microelectrodes


Abstract:

This paper presents an electrochemical seismometer with parylene based microelectrodes for detecting micro seismic signals. Compared to silicon based counterpart, parylen...Show More

Abstract:

This paper presents an electrochemical seismometer with parylene based microelectrodes for detecting micro seismic signals. Compared to silicon based counterpart, parylene based microelectrodes can effectively decrease the thickness of the insulating layer, which contributes to the increase in sensitivity and decrease in cost. The proposed electrochemical seismometer was designed, fabricated and characterized, producing a sensitivity of one order higher than silicon based counterpart.
Date of Conference: 09-12 April 2017
Date Added to IEEE Xplore: 29 August 2017
ISBN Information:
Electronic ISSN: 2474-3755
Conference Location: Los Angeles, CA, USA

References

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