Abstract:
This paper presents a novel PMUT integrated with a central circular and an annular diaphragms. Compared with the traditional PMUT with circular diaphragm, the proposed PM...Show MoreMetadata
Abstract:
This paper presents a novel PMUT integrated with a central circular and an annular diaphragms. Compared with the traditional PMUT with circular diaphragm, the proposed PMUT had the advantages that (1) it had an ultra-high ultrasonic emission power output and (2) it achieved much higher emission performance when working in array mode due to its reduced cross talk characteristics. Two different dimensions were presented for the proposed PMUT with the work frequencies of 9.8MHz and 6.3MHz, respectively. And the emission sensitivity of proposed PMUT shown a remarkable increase compared with the traditional circular PMUT in water.
Published in: 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Date of Conference: 22-26 April 2018
Date Added to IEEE Xplore: 06 December 2018
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