Abstract:
In this paper, a circular interdigital transducers (IDTs) excited lamb wave humidity sensor with graphene oxide (GO) as sensing layer is firstly reported. The circular ID...Show MoreMetadata
Abstract:
In this paper, a circular interdigital transducers (IDTs) excited lamb wave humidity sensor with graphene oxide (GO) as sensing layer is firstly reported. The circular IDTs are adopted to deal with lamb wave diffraction problem due to finite aperture of conventional straight IDTs. Test results show the humidity sensitivity of the circular IDTs excited sensor is 1.5 times higher than that of conventional straight IDTs excited sensor within a wide detection range from 10%RH to 90%RH. In addition to excellent stability and repeatability, the sensor also has very little hysteresis, fast response and quick recovery speed. Moreover, utilizing the AlN/Si (doped) layered structure, small temperature coefficient of frequency (TCF) of -19.8 ppm/°C of the sensor is achieved.
Published in: 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Date of Conference: 22-26 April 2018
Date Added to IEEE Xplore: 06 December 2018
ISBN Information:
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