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A Fast Response MEMS Piezoelectric Microlens Actuator with Large Stroke and Low Driving Voltage | IEEE Conference Publication | IEEE Xplore

A Fast Response MEMS Piezoelectric Microlens Actuator with Large Stroke and Low Driving Voltage


Abstract:

The design, fabrication, and testing of a novel piezoelectrically driven microlens actuator with large stroke and low driving voltage is presented. The device is fabricat...Show More

Abstract:

The design, fabrication, and testing of a novel piezoelectrically driven microlens actuator with large stroke and low driving voltage is presented. The device is fabricated on a 6 μm thick ultra-high vacuum e-beam evaporated polysilicon film as the structural platform, which enables cost reduction and design flexibility in comparison to devices fabricated on SOI wafers. The annulus microlens platform is actuated by six independently driven d31 unimorph PZT-based actuator beams. The microlens actuator has a measured out-of-plane displacement of 145 μm at 100 kV/cm (22 V) with a resonant frequencies of 2 kHz and 0.83 kHz for unloaded and unload lens, respectively. The total footprint of the device is 35 mm2.
Date of Conference: 22-26 April 2018
Date Added to IEEE Xplore: 06 December 2018
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Conference Location: Singapore

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