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Direct and all-dry microfabrication of ultramicroelectrode based on cold atmospheric microplasma jet | IEEE Conference Publication | IEEE Xplore

Direct and all-dry microfabrication of ultramicroelectrode based on cold atmospheric microplasma jet


Abstract:

We develop a direct and all-dry microfabrication method of ultramicroelectrode based on cold atmospheric microplasma jet. The microfabrication process includes micropipet...Show More

Abstract:

We develop a direct and all-dry microfabrication method of ultramicroelectrode based on cold atmospheric microplasma jet. The microfabrication process includes micropipette preparation, metal sputtering, chemical vapor deposition of parylene-C layer and microplasma jet micromachining (Fig. 1). The generated microplasma jet can effectively remove the polymer layer on the tip. The exposed metal part can be used as ultramicroelectrode point or further modified with electrochemical deposition and other methods. The exposed area can be controlled by the treatment time and the average etching rate is approximately 1.1 \mu\mathrm{m}/\mathrm{s}. Due to the properties of cold atmospheric microplasma jet, the microfabrication can be realized without high-precision machining and vacuum equipment.
Date of Conference: 25-29 April 2021
Date Added to IEEE Xplore: 21 June 2021
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Conference Location: Xiamen, China

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