Abstract:
In this paper, a novel electrodes design for in-plane measurement of single-structure quadruple mass multi-axis MEMS inertial devices is proposed to achieve the closed-lo...View moreMetadata
Abstract:
In this paper, a novel electrodes design for in-plane measurement of single-structure quadruple mass multi-axis MEMS inertial devices is proposed to achieve the closed-loop x/y-axis acceleration measurement. The designed 45 ° tilting comb electrodes combine synovial comb electrodes and laminated comb electrodes and meet the same electrostatic force coefficient on quadruple mass, with structural symmetry design ensured. Theoretical formula is analyzed in detail, which provides guidance for simulation and design.
Published in: 2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Date of Conference: 14-17 May 2023
Date Added to IEEE Xplore: 31 July 2023
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Conference Location: Jeju Island, Korea, Republic of