A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices | IEEE Conference Publication | IEEE Xplore

A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices

Publisher: IEEE

Abstract:

In this paper, a novel electrodes design for in-plane measurement of single-structure quadruple mass multi-axis MEMS inertial devices is proposed to achieve the closed-lo...View more

Abstract:

In this paper, a novel electrodes design for in-plane measurement of single-structure quadruple mass multi-axis MEMS inertial devices is proposed to achieve the closed-loop x/y-axis acceleration measurement. The designed 45 ° tilting comb electrodes combine synovial comb electrodes and laminated comb electrodes and meet the same electrostatic force coefficient on quadruple mass, with structural symmetry design ensured. Theoretical formula is analyzed in detail, which provides guidance for simulation and design.
Date of Conference: 14-17 May 2023
Date Added to IEEE Xplore: 31 July 2023
ISBN Information:

ISSN Information:

Publisher: IEEE
Conference Location: Jeju Island, Korea, Republic of

Funding Agency:


References

References is not available for this document.