Abstract:
MEMS resonators integrated with CMOS feedback networks have a potentially wide field of applications as oscillator circuits in communications and sensor systems. However,...Show MoreMetadata
Abstract:
MEMS resonators integrated with CMOS feedback networks have a potentially wide field of applications as oscillator circuits in communications and sensor systems. However, considerable advancements to this nascent technology are required to realize such a vision. We present a configurable CMOS chip which facilitates the development of MEMS-referenced oscillators, especially for timing and sensing applications in harsh environments. The chip has been designed in the OnSemi 3M2P 0.5 μm process. It supports MEMS resonators with various frequencies (10-120 kHz), resonant modes, and impedance levels, thus allowing interfacing to a wide range of devices. This paper describes analysis, design, and simulation results.
Date of Conference: 26-29 June 2016
Date Added to IEEE Xplore: 24 October 2016
ISBN Information: