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High-Performance MEMS Pressure Sensor Fully-Integrated with a 3-Axis Accelerometer | IEEE Conference Publication | IEEE Xplore

High-Performance MEMS Pressure Sensor Fully-Integrated with a 3-Axis Accelerometer


Abstract:

The originality of the MEMS pressure sensor presented in this paper is due to the adjunction of a lever arm to sense the deformation of the diaphragm by suspended piezore...Show More

Abstract:

The originality of the MEMS pressure sensor presented in this paper is due to the adjunction of a lever arm to sense the deformation of the diaphragm by suspended piezoresistive nanogauges. This transduction scheme can be easily transposed onto others inertial MEMS, and the paper illustrates this capability by the cointegration of a 10bar MEMS pressure sensor with a 3-axis MEMS accelerometers. The fabricated pressure transducer demonstrates high performances: the sensitivity is 6mV/V/bar and the pressure accuracy is estimated lower than 0,15% full scale for -35°C/+145°C temperature range.
Published in: 2019 IEEE SENSORS
Date of Conference: 27-30 October 2019
Date Added to IEEE Xplore: 14 January 2020
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Conference Location: Montreal, QC, Canada

References

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