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Dual-Mass Resonator with Dynamically Balanced Structure for Roll/Pitch Rate Integrating Gyroscope | IEEE Conference Publication | IEEE Xplore

Dual-Mass Resonator with Dynamically Balanced Structure for Roll/Pitch Rate Integrating Gyroscope


Abstract:

In this paper, a degenerated in-plane and out-of-plane 2-axis resonators for roll/pitch rate integrating gyroscopes (RIGs) is reported. A dynamically balanced out-of-plan...Show More

Abstract:

In this paper, a degenerated in-plane and out-of-plane 2-axis resonators for roll/pitch rate integrating gyroscopes (RIGs) is reported. A dynamically balanced out-of-plane resonator is proposed to achieve small frequency mismatch between in-plane and out-of-plane modes, with high quality-factors (Q-factors). An innovative dual-mass structure was designed to reduce the torque applied to the supporting substrate in the out-of-plane mode, and thus increased the Q-factor. The concept was confirmed by both numerical simulation and the measurement of a real device. The finite element analysis (FEA) study showed the frequency mismatch as small as 6.3 Hz. Fabrication process using Au-Au thermo-compression bonding has been developed. The experimental characterization revealed that the mismatches of resonant frequencies and Q-factors were 106 Hz and 790, respectively.
Published in: 2021 IEEE Sensors
Date of Conference: 31 October 2021 - 03 November 2021
Date Added to IEEE Xplore: 17 December 2021
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Conference Location: Sydney, Australia

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