Abstract:
In this paper, we demonstrate the ability of identifying ppm level of concentrations of three volatile organic compounds using micromachined quartz resonators. 100 nm fil...Show MoreMetadata
Abstract:
In this paper, we demonstrate the ability of identifying ppm level of concentrations of three volatile organic compounds using micromachined quartz resonators. 100 nm films of functional polymers were deposited on the resonators for the identification of ethanol, acetone, and toluene. Adsorption of gas vapors by the functional polymer films results in resonance frequency shifts of the quartz resonators. Principal component analysis (PCA) was performed on the raw frequency shift data collected. PCA analysis is able to determine components that allow for the gas species identification. Further transformation of these components allows for clustering by concentration.
Published in: 2021 IEEE Sensors
Date of Conference: 31 October 2021 - 03 November 2021
Date Added to IEEE Xplore: 17 December 2021
ISBN Information: