Abstract:
This paper introduces a novel model to predict the dynamic response of piezoelectric micromirrors. The model addresses both geometric nonlinearities caused by large rotat...Show MoreMetadata
Abstract:
This paper introduces a novel model to predict the dynamic response of piezoelectric micromirrors. The model addresses both geometric nonlinearities caused by large rotation amplitudes and the nonlinear response of piezoelectric films upon the application of large drive voltages. The proposed model is applied to predict the dynamic response of a MEMS micromirror actuated with PZT films. Numerical simulations are performed through the harmonic balance finite element method and results are validated with experimental data.
Published in: 2020 IEEE SENSORS
Date of Conference: 25-28 October 2020
Date Added to IEEE Xplore: 09 December 2020
ISBN Information: