Abstract:
Leading-edge chip makers are moving towards more regular litho-friendly design styles in order to combat litho-induced process variations. This paper explores layout desi...Show MoreMetadata
Abstract:
Leading-edge chip makers are moving towards more regular litho-friendly design styles in order to combat litho-induced process variations. This paper explores layout design providing several layout templates and we propose a fast and simple design metric to evaluate the potential benefits and weaknesses of a given template. We show that a regular cell template can achieve similar overall qualification compared to a traditional 2D standard cell design.
Published in: 2012 IEEE International SOC Conference
Date of Conference: 12-14 September 2012
Date Added to IEEE Xplore: 31 December 2012
ISBN Information: