Abstract:
Implementation and Benefits of an Automated Instrumentation System for Reliability, Aging and Accelerated Life Testing of Liquid Flow Rate Measuring Instruments used in S...Show MoreMetadata
Abstract:
Implementation and Benefits of an Automated Instrumentation System for Reliability, Aging and Accelerated Life Testing of Liquid Flow Rate Measuring Instruments used in Semiconductor Manufacturing Process Control, Chemical Vapor Deposition Chambers, and Nanotechnology design with real-life automated test system. Automated test system collects data, controls key elements, delivers alerts to users, and monitors real time results. The combination of automation and CVD Chamber process control can help stabilize and maintain temperature levels to obtain a higher yield in production and reduce overall energy consumption in the system.
Date of Conference: 21-24 March 2016
Date Added to IEEE Xplore: 19 May 2016
ISBN Information: