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Extended range of a MEMS electrostatic actuator using an adjustable linear controller | IEEE Conference Publication | IEEE Xplore

Extended range of a MEMS electrostatic actuator using an adjustable linear controller


Abstract:

Electrostatic MEMS actuators suffer from a limited travel range to nearly one-third of the initial electrostatic gap distance because of the nonlinearity of the electrost...Show More

Abstract:

Electrostatic MEMS actuators suffer from a limited travel range to nearly one-third of the initial electrostatic gap distance because of the nonlinearity of the electrostatic force. This limitation, that restrict its performances, can be extended by controlling its stability through a series of adjustable capacitors. We develop a mathematical model of the system that incorporates all nonlinearities in order to represent a more realistic model. Static and transient analysis of the design are explored for their range of stable solutions. The simulation results show that the introduced linear controller can extend the range of travel up to 96% of its initial value.
Date of Conference: 22-25 March 2021
Date Added to IEEE Xplore: 20 May 2021
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Conference Location: Monastir, Tunisia

References

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