Machine Learning for Yield Learning and Optimization | IEEE Conference Publication | IEEE Xplore

Machine Learning for Yield Learning and Optimization


Abstract:

Yield learning and optimization are critical for advanced IC design and manufacturing. Recent advance in machine learning has brought a lot of new opportunities in improv...Show More

Abstract:

Yield learning and optimization are critical for advanced IC design and manufacturing. Recent advance in machine learning has brought a lot of new opportunities in improving the performance and efficiency of IC yield learning and optimization. This paper surveys some recent results of using various machine learning/deep learning techniques for such purpose, including performance modeling under uncertainty, lithography modeling with transfer/active learning, lithography hotspot detection, and IC mask optimization. The state-of-the-art methods are explained, and challenges/opportunities are discussed.
Date of Conference: 29 October 2018 - 01 November 2018
Date Added to IEEE Xplore: 24 January 2019
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Conference Location: Phoenix, AZ, USA

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