A Novel CMUT-Based Resonant Biochemical Sensor Using Electrospinning Technology | IEEE Journals & Magazine | IEEE Xplore

A Novel CMUT-Based Resonant Biochemical Sensor Using Electrospinning Technology


Abstract:

In this paper, a novel capacitive micromachined ultrasonic transducer (CMUT)-based resonant biochemical sensor is presented to detect SO2 with a sensitive polymer layer f...Show More

Abstract:

In this paper, a novel capacitive micromachined ultrasonic transducer (CMUT)-based resonant biochemical sensor is presented to detect SO2 with a sensitive polymer layer functionalized by electrospinning technology. The electrospinning technology is proposed as an innovative functionalization method to fabricate nano reticular polymer fibers with the diameters of 50-500 nm on the movable plates of the CMUTs. The surface topography of electrospun nanofibers and the impedance properties of functionalized CMUTs are characterized. The CMUT-based resonant biochemical sensor is packaged to detect SO2 in the experiments. Its resonant frequency shifts vary against the variation of SO2 concentration. The influences of the mixed gas flow rate are also analyzed. These show that the proposed sensor has good volume sensitivity and frequency stability.
Published in: IEEE Transactions on Industrial Electronics ( Volume: 66, Issue: 9, September 2019)
Page(s): 7356 - 7365
Date of Publication: 31 October 2018

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