Correction to “Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications” [Apr 18 3576-3584] | IEEE Journals & Magazine | IEEE Xplore
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IEEE Transactions on Industri...
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Volume: 67 Issue: 11
Correction to “Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications” [Apr 18 3576-3584]
Publisher:
IEEE
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Guoqiang Wu
;
Jinghui Xu
;
Xiaolin Zhang
;
Nan Wang
;
Danlei Yan
;
Jayce Lay Keng Lim
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Abstract:
Presents corrections to the above named paper.
Metadata
Abstract:
Presents corrections to the above named paper.
Published in:
IEEE Transactions on Industrial Electronics
(
Volume: 67
,
Issue: 11
, November 2020
)
Page(s):
9976
- 9976
Date of Publication:
21 July 2020
ISSN Information:
DOI:
10.1109/TIE.2019.2959966
Publisher:
IEEE
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