In nanoscale digital CMOS IC design, the large technology parameter variations have boosted the interest in statistical performance analysis. As the huge execution time of SPICE-based transistor-level Monte Carlo analysis is impractical for complex designs, there is a need for making accurate Monte Carlo analysis feasible through fast logic-level simulators. This paper presents a new, general logic model of digital CMOS cells featuring technology variation aware timing, and its prototype implementation in a standard hardware-description-language environment. The application of the approach to typical standard cells and test circuits shows very good agreement with SPICE BSIM4 transistor-level simulation both for nominal delay and for statistical Monte Carlo analyses.