Abstract:
This work introduces the first high-volume manufacturable metal-fuse technology in a 22nm tri-gate high-k metal-gate CMOS process. A high-density array featuring a 16.4μm...Show MoreMetadata
Abstract:
This work introduces the first high-volume manufacturable metal-fuse technology in a 22nm tri-gate high-k metal-gate CMOS process. A high-density array featuring a 16.4μm2 1T1R bit cell is presented that delivers a record low program voltage of 1.6V. This low-voltage operability allows the array to be coupled with logic-voltage power delivery circuits. A charge pump voltage doubler operating on a 1V voltage rail is demonstrated in this paper with healthy fusing yield.
Published in: 2015 Symposium on VLSI Circuits (VLSI Circuits)
Date of Conference: 17-19 June 2015
Date Added to IEEE Xplore: 03 September 2015
Print ISBN:978-4-86348-502-0