Abstract:
Semiconductor wafer fabrication is perhaps one of the most complex manufacturing processes found today. In this paper, we construct a simulation model of part of a wafer ...Show MoreMetadata
Abstract:
Semiconductor wafer fabrication is perhaps one of the most complex manufacturing processes found today. In this paper, we construct a simulation model of part of a wafer fab using ProModel/sup /spl reg// software and analyze the effect of different input variables on selected parameters, such as cycle time, WIP level and equipment utilization rates. These input variables include arrival distribution, batch size, downtime pattern and lot release control. SEMATECH DATASET which has the original actual wafer fab data is used for our analysis.
Published in: Proceedings of the Winter Simulation Conference
Date of Conference: 08-11 December 2002
Date Added to IEEE Xplore: 22 January 2003
Print ISBN:0-7803-7614-5
Contents 