Abstract:
The competitive environment faced by semiconductor equipment suppliers leaves no room for error when designing next generation tools. In addition, time to market, footpri...Show MoreMetadata
Abstract:
The competitive environment faced by semiconductor equipment suppliers leaves no room for error when designing next generation tools. In addition, time to market, footprint, and equipment capabilities are all key to a successful product. At Cookson Electronics Equipment, tool designers used simulation to answer some difficult design questions, improve time to market, and lower development costs. We explain how simulation was used in designing the new high volume batch (HVB) dispensing platform. It also discusses the flexible simulation model and simulation results for various prototype equipment designs.
Date of Conference: 07-10 December 2003
Date Added to IEEE Xplore: 30 January 2004
Print ISBN:0-7803-8131-9