Abstract:
Cluster tools play an important role in modern semiconductor fabs. Due to their complexity in configuration and their varying material flow, the creation of accurate thro...Show MoreMetadata
Abstract:
Cluster tools play an important role in modern semiconductor fabs. Due to their complexity in configuration and their varying material flow, the creation of accurate throughput models for cluster tools is a demanding task. Proposed analytical approaches are either quite intricate and require manual maintenance process, or are inexact due to reliance on lot-level events. This paper presents an approach for the automated generation and parameterization of detailed cluster tool models based on bottleneck analysis. Equipment configuration as well as all throughput model base data is extracted from recent equipment reporting data.
Published in: 2008 Winter Simulation Conference
Date of Conference: 07-10 December 2008
Date Added to IEEE Xplore: 30 December 2008
ISBN Information: