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Machine Learning-Based Periodic Setup Changes for Semiconductor Manufacturing Machines | IEEE Conference Publication | IEEE Xplore

Machine Learning-Based Periodic Setup Changes for Semiconductor Manufacturing Machines


Abstract:

Semiconductor manufacturing machines, especially for photo-lithography processes, require large setup times when changing job types. Hence, setup operations do not often ...Show More

Abstract:

Semiconductor manufacturing machines, especially for photo-lithography processes, require large setup times when changing job types. Hence, setup operations do not often occur unless there is no job to be processed. In practice, a simulation-based method that predicts the incoming WIP is often used to determine whether changing machine setup states or not. The simulation-based method can provide useful information on the future production environment with a high accuracy but takes a long time, which can delay the setup change decisions. Therefore, this work proposes a machine learning-based approach that determines setup states of the machines. The proposed method shows better performance than several heuristic rules in terms of movement.
Date of Conference: 12-15 December 2021
Date Added to IEEE Xplore: 23 February 2022
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Conference Location: Phoenix, AZ, USA

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