Zhiyi Leng
ABSTRACT
Single crystal germanium has good physical and chemical property, but it is difficult to be processed. It had been found that plastic deformation of brittle materials could be produced in a small range by using two-phase flow processing technology, which could make the surface of single crystal germanium effective processed. Temporarily, the simulation studies of multi-gain impaction during processing had been focused on one direct impaction, which lack of multi-direct impaction analysis. The paper based on Hrosovsky's theory of grain impact abrasion, used ABAQUS FEM software to establish a multi-grain and multi-direct impaction model to simulate the polishing process, and designed experiment to validate the availability of simulation. After analyzed the results of experiment and the simulation found that, the grains' multi-direct impaction has negative effects that should be avoided during the processing. The experiment validated the availability of simulation model, also, found the deficiency of the model. The paper provides a new research idea in two phrase flow polishing process.
- Chen, G., Ni, Z., Bai, Y., Li, Q., and Zhao, Y.. The role of interactions between abrasive particles and the substrate surface in chemical-mechanical planarization of si-face 6h-sic. RSC Advances, Vol. 28, pp. 16938--16952. March. 2017.Google Scholar
Cross Ref
- Nguyen, T., Liu, D., Thongkaew, K., Li, H., Huan, Q., et al. The wear mechanisms of reaction bonded silicon carbide under abrasive polishing and slurry jet impact conditions. Wear, Vol. 10. June. 2018.Google Scholar
- Kartal, Fuat. A review of the current state of abrasive water-jet turning machining method. The International Journal of Advanced Manufacturing Technology, Vol. 88, pp. 495--505. January. 2017.Google ScholarCross Ref
- Jha, S., Jain, V. K.. A novel nanofinishing process using magnetorheological abrasive polishing fluid. International Journal of Manufacturing Technology & Management, Vol. 21, pp. 4--16. March. 2017.Google ScholarCross Ref
- Miao, X., Wu, M., Song, L., Ye, F., and Qiang, Z.. Research on the method of stacked cutting of abrasive water jet. The International Journal of Advanced Manufacturing Technology, Volume 103, pp. 597--604. July. 2019.Google ScholarCross Ref
- Rastegar, Vahid. Effect of large particles during chemical mechanical polishing based on numerical modeling of abrasive particle trajectories and material removal non-uniformity. IEEE Transactions on Semiconductor Manufacturing, IEEE Transactions on Semiconductor Manufacturing, Vol. 99, pp. 1--1. January. 2018.Google Scholar
- Tsai H., Huang P., Tsai H.. Chemical Mechanical Polishing in Elastic Contact and Partial Hydrodynamic Lubrication: Modeling and Experiments. Materials & Manufacturing Processes, Vol. 26, pp.319--324, 2011.Google ScholarCross Ref
- Zhang, T., Yu, T., Yang, T., Wang, Z., and Zhao, J.. Experimental and simulation studies of abrasive particles impacting monocrystalline silicon in suspension thin film flow field of ultrasonic polishing. The International Journal of Advanced Manufacturing Technology, Vol. 103, pp. 819--840, July. 2019.Google ScholarCross Ref
- Lin, Z. C., Wang, R. Y., Jhang, Z. W.. Establishing a theoretical model for abrasive removal depth of silicon wafer chemical mechanical polishing by integrating a polishing times analytical model and specific down force energy theory. International Journal of Advanced Manufacturing Technology, Vol. 95, pp. 4671--4683, Apirl. 2018.Google ScholarCross Ref
- Chen C.X.. Friction and Wear Properties of Single Crystal Silicon Wafer under Dry Sliding and Water Lubrication. China Mechanical Engineering, Vol. 23, pp. 1738--1741, March, 2012.Google Scholar
- Zhou, H., Ding, W., Liu, C.. Material removal mechanism of ptmcs in high-speed grinding when considering consecutive action of two abrasive grains. The International Journal of Advanced Manufacturing Technology. Vol. 100, pp. 153--165, January, 2019.Google ScholarCross Ref
- Ji S.M., Wang J.Q., Tan D.P.. Influence of colliding of single particle and the processing wall on solid-liquid flow processing with ABAQUS. Journal of Mechanical & Electrical Engineering, Vol.30, pp. 1--14, January. 2013.Google Scholar
- Song W., Yuan Q.L., Dai Y. and Zhong H.D.. Theoretical and experimental studies of the wear based on single-particle impacting, Manufacturing Technology & Machine Tool, Vol.8, pp. 118--223, Augeust, 2015.Google Scholar
- Yang X.J., Liu Y.R., Fang C.C.. Experiments on anisotropic mechanical properties of single crystal germanium. Transactions of the Chinese Society for Agricultural Machinery, Vol. 5, pp. 322--326, May, 2014.Google Scholar
- C.X. Shi. Plastic deformation of steel no. 45 under reciprocating impact load. Journal of Qingdao Technological University, Vol. 33, pp.70--75, September, 2012Google Scholar
Index Terms
- Multi-grain and Multi-direct Impact Simulation on ABAQUS and Experimental Analysis of Single Crystal Germanium Surface Polishing
Recommendations
Vertical single-crystal ZnO nanowires grown on ZnO: Ga/glass templates
Vertical single-crystal ZnO nanowires with uniform diameter and uniform length were selectively grown on ZnO:Ga/glass templates at 600°C by a self-catalyzed vapor-liquid-solid process without any metal catalyst. It was found that the ZnO nanowires ...
Polishing behaviors of single crystalline ceria abrasives on silicon dioxide and silicon nitride CMP
The effects of single crystalline ceria (CeO"2) abrasives in chemical mechanical polishing (CMP) slurries were investigated for silicon dioxide (SiO"2) and silicon nitride (Si"3N"4) CMP process. The size of ceria abrasives was controlled by varying ...
Magnetic anisotropy in single-crystal thin films
Thin, single-crystal films of Ni, Fe, Ni-Fe and Ni-Co have been grown by vacuum deposition onto heated rock salt. The cubic crystalline anisotropy constant, K1, of these films has been measured at room temperature by a torque method. In the case of the ...
Comments