IEICE Transactions on Electronics
Online ISSN : 1745-1353
Print ISSN : 0916-8524
Special Section on Fundamentals and Applications of Advanced Semiconductor Devices
Vacuum Annealing and Passivation of HfS2 FET for Mitigation of Atmospheric Degradation
Vikrant UPADHYAYAToru KANAZAWAYasuyuki MIYAMOTO
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2017 Volume E100.C Issue 5 Pages 453-457

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Abstract

The performance of devices based on two dimensional (2D) materials is significantly affected upon prolonged exposure to atmosphere. We analyzed time based environmental degradation of electrical properties of HfS2 field effect transistors. Atmospheric entities like oxygen and moisture adversely affect the device surface and reduction in drain current is observed over period of 48 hours. Two corrective measures, namely, PMMA passivation and vacuum annealing, have been studied to address the diminution of current by contaminants. PMMA passivation prevents the device from environment and reduces the effect of Coulomb scattering. Improvement in current characteristics signifies the importance of dielectric passivation for 2D materials. On the other hand, vacuum annealing is useful in removing contaminants from the affected surface. In order to figure out optimum process conditions, properties have been studied at various annealing temperatures. The improvement in drain current level was observed upon vacuum annealing within optimum range of annealing temperature.

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© 2017 The Institute of Electronics, Information and Communication Engineers
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