Fabrication of Integrated PTFE-Filled Waveguide Butler Matrix for Short Millimeter-Wave by SR Direct Etching

Mitsuyoshi KISHIHARA; Masaya TAKEUCHI; Akinobu YAMAGUCHI; Yuichi UTSUMI; Isao OHTA

doi:10.1587/transele.E101.C.416

Regular Section

Fabrication of Integrated PTFE-Filled Waveguide Butler Matrix for Short Millimeter-Wave by SR Direct Etching

Mitsuyoshi KISHIHARA, Masaya TAKEUCHI, Akinobu YAMAGUCHI, Yuichi UTSUMI, Isao OHTA

Author information

Keywords: microstructure, X-ray lithography, dielectric loaded waveguides, Butler matrix, millimeter wave circuits

JOURNAL RESTRICTED ACCESS

2018 Volume E101.C Issue 6 Pages 416-422

DOI https://doi.org/10.1587/transele.E101.C.416

Details

Abstract

The microfabrication technique based on SR (Synchrotron Radiation) direct etching process has recently been applied to construct PTFE microstructures. This paper attempts to fabricate an integrated PTFE-filled waveguide Butler matrix for short millimeter-wave by SR direct etching. First, a cruciform 3-dB directional coupler and an intersection circuit (0-dB coupler) are designed at 180 GHz. Then, a 4×4 Butler matrix with horn antennas is designed and fabricated. Finally, the measured radiation patterns of the Butler matrix are shown.

Corresponding author

Register with J-STAGE for free!