IEICE Transactions on Electronics
Online ISSN : 1745-1353
Print ISSN : 0916-8524
Special Section on Electronic Displays
Al-Zn-Sn-O Thin Film Transistors with Top and Bottom Gate Structure for AMOLED
Doo-Hee CHOSang-Hee Ko PARKShinhyuk YANGChunwon BYUNMin Ki RYUJeong-Ik LEEChi-Sun HWANGSung Min YOONHye Yong CHUKyoung Ik CHO
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2009 Volume E92.C Issue 11 Pages 1340-1346

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Abstract

We have fabricated the transparent bottom gate and top gate TFTs using new oxide material of Al-Zn-Sn-O (AZTO) as an active layer. The AZTO active layer was deposited by RF magnetron sputtering at room temperature. Our novel TFT showed good TFT performance without post-annealing. The field effect mobility and the sub-threshold swing were improved by the post-annealing, and the mobility increased with SnO2 content. The AZTO TFT (about 4 mol% AlOx, 66 mol% ZnO, and 30 mol% SnO2) exhibited a mobility of 10.3cm2/Vs, a turn-on voltage of 0.4V, a sub-threshold swing of 0.6V/dec, and an on/off ratio of 109. Though the bottom gate AZTO TFT showed good electrical performance, the bias stability was relatively poor. The bias stability was significantly improved in the top gate AZTO TFT. We have successfully fabricated the transparent AMOLED panel using the back-plane composed with top gate AZTO TFT array.

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© 2009 The Institute of Electronics, Information and Communication Engineers
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