In this paper we present eigenmode analysis of the propagation constant for a microstrip line with dummy fills on a Si CMOS substrate. The effect of dummy fills is not negligible, particularly in the millimeter-wave band, although it has been ignored below frequencies of a fewGHz. The propagation constant of a microstrip line with a periodic structure on a Si CMOS substrate is analyzed by eigenmode analysis for one period of the line. The calculated propagation constant and characteristic impedance were compared with measured values for a chip fabricated by the 0.18µm CMOS process. The agreement between the analysis and measurement was very good. The dependence of loss on the arrangement of dummy fills was also investigated by eigenmode analysis. It was found that the transmission loss becomes large when dummy fills are arranged at places where the electromagnetic field is strong.