IEICE Transactions on Electronics
Online ISSN : 1745-1353
Print ISSN : 0916-8524
Joint Special Section on Opto-electronics and Communications for Future Optical Network
Silicon Mach-Zehnder Waveguide Interferometer on Silicon-on-Silicon (SOS) Substrate Incorporating the Integrated Three-Terminal Field-Effect Device as an Optical Signal Modulation Structure
Ricky W. CHUANGMao-Teng HSUShen-Horng CHOUYao-Jen LEE
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2011 Volume E94.C Issue 7 Pages 1173-1178

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Abstract

Silicon Mach-Zehnder interferometric (MZI) waveguide modulator incorporating the n-channel junction field-effect transistor (JFET) as a signal modulation unit was designed, fabricated, and analyzed. The proposed MZI with JFET was designed to operate based on the plasma dispersion effect in the infrared wavelength of 1550nm. The three different modulation lengths (ML) of 500, 1000, and 2000µm while keeping the overall MZI length constant at 1.5cm were set as a general design rule for these 10µm-wide MZIs under study. When the JFET was operated in an active mode by injecting approximately 50mA current (Is) to achieve a π phase shift, the modulation efficiency of the device was measured to be η =π/(Is·L) $\\simeq$ 40π/A-mm. The temporal and frequency response measurements also demonstrate that the respectively rise and fall times measured using a high-speed photoreceiver were in the neighborhood of 8.5 and 7.5µsec and the 3dB roll-off frequency (f3dB) measured was in the excess of ∼400kHz.

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© 2011 The Institute of Electronics, Information and Communication Engineers
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