Lead-Zirconate-Titanate Acoustic Energy Harvester Equipped with Sound-Collecting Helmholtz Resonator

Tomohiro MATSUDA; Kazuki TOMII; Satoshi IIZUMI; Shungo TOMIOKA; Shu KIMURA; Kyohei TSUJIMOTO; Yusuke UCHIDA; Saori HAGIWARA; Shuntaro MIYAKE; Yasushiro NISHIOKA

doi:10.1587/transele.E96.C.722

Special Section on Fundamentals and Applications of Advanced Semiconductor Devices

Lead-Zirconate-Titanate Acoustic Energy Harvester Equipped with Sound-Collecting Helmholtz Resonator

Tomohiro MATSUDA, Kazuki TOMII, Satoshi IIZUMI, Shungo TOMIOKA, Shu KIMURA, Kyohei TSUJIMOTO, Yusuke UCHIDA, Saori HAGIWARA, Shuntaro MIYAKE, Yasushiro NISHIOKA

Author information

Tomohiro MATSUDA
Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
Kazuki TOMII
Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
Satoshi IIZUMI
Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
Shungo TOMIOKA
Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
Shu KIMURA
Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
Kyohei TSUJIMOTO
Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
Yusuke UCHIDA
Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
Saori HAGIWARA
Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
Shuntaro MIYAKE
Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
Yasushiro NISHIOKA
Department of Precision Machinery Engineering, College of Science and Technology, Nihon University

Keywords: PZT, acoustic, energy harvester, Helmholtz resonator

JOURNAL RESTRICTED ACCESS

2013 Volume E96.C Issue 5 Pages 722-725

DOI https://doi.org/10.1587/transele.E96.C.722

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Abstract

Acoustic energy harvesters that function in environments where sound pressure is extremely high (∼150dB), such as in engine rooms of aircraft, are expected to be capable of powering wireless health monitoring systems. This paper presents the power generation performance of a lead-zirconate-titanate (PZT) acoustic energy harvester with a vibrating PZT diaphragm. The diaphragm had a diameter of 2mm, consisting of Al (0.1µm)/PZT (1µm)/Pt (0.1µm)/Ti (0.1µm)/SiO₂ (1.5µm). The harvester generated a power of 5×10^-14W under a sound pressure level of 110dB at the first resonance frequency of 6.28kHz. It was found that the generated power was increased to 2.0×10^-13W using a sound-collecting Helmholtz resonator cone with a height of 60mm. The cone provided a Helmholtz resonance at 5.8kHz, and the generated power increased from 9.7×10^-15W to 7.3×10^-13W at this frequency. The cone was also effective in increasing the bandwidth of the energy harvester.

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