IEICE Transactions on Electronics
Online ISSN : 1745-1353
Print ISSN : 0916-8524
Special Section on Recent Advances in Integrated Photonic Devices
Optical Microsensors Integration Technologies for Biomedical Applications
Eiji HIGURASHIRenshi SAWADATadatomo SUGA
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2009 Volume E92.C Issue 2 Pages 231-238

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Abstract

This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance, small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment technology, low temperature bonding technology, and packaging technology for realizing advanced microsensors. Then, we describe an integrated laser Doppler flowmeter that can monitor blood flow in human skin.

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© 2009 The Institute of Electronics, Information and Communication Engineers
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