Transition Edge Sensor-Energy Dispersive Spectrometer (TES-EDS) and Its Applications

Keiichi TANAKA; Akikazu ODAWARA; Atsushi NAGATA; Yukari BABA; Satoshi NAKAYAMA; Shigenori AIDA; Toshimitsu MOROOKA; Yoshikazu HOMMA; Izumi NAKAI; Kazuo CHINONE

doi:10.1587/transele.E92.C.334

Special Section on Recent Progress in Superconducting Analog Devices and Their Applications

Transition Edge Sensor-Energy Dispersive Spectrometer (TES-EDS) and Its Applications

Keiichi TANAKA, Akikazu ODAWARA, Atsushi NAGATA, Yukari BABA, Satoshi NAKAYAMA, Shigenori AIDA, Toshimitsu MOROOKA, Yoshikazu HOMMA, Izumi NAKAI, Kazuo CHINONE

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Keywords: energy dispersive X-ray detector, scanning electron microscope, superconducting transition temperature, dilution refrigerator, high energy resolution

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2009 Volume E92.C Issue 3 Pages 334-340

DOI https://doi.org/10.1587/transele.E92.C.334

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Abstract

The Transition Edge Sensor (TES)-Energy Dispersive Spectrometer (EDS) is an X-ray detector with high-energy resolution (12.8eV). The TES can be mounted to a scanning electron microscope (SEM). The TES-EDS is based on a cryogen-free dilution refrigerator. The high-energy resolution enables analysis of the distribution of various elements in samples under low acceleration voltage (typically under 5keV) by using K-lines of light elements and M lines of heavy elements. For example, the energy of the arsenic L line differs from the magnesium K line by 28eV. When used to analyze the spore of the Pteris vittata L plant, the TES-EDS clearly reveals a different distribution of As and Mg in the micro region of the plant. The TES-EDS with SEM yields detailed information about the distribution of multi-elements in a sample.

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