Regular Section
Electrical and Mechanical Characteristics of Au-, Pt-, and Pd-Doped Carbon Thin Films
2010 Volume E93.C Issue 4 Pages 527-530
Details
2010 Volume E93.C Issue 4 Pages 527-530
To achieve conductive and wear-durable carbon thin films by metal doping, we deposited Au-, Pt-, and Pd-doped carbon thin films by RF sputtering, and evaluated the dopant concentrations, resistivity, and scratch hardness. Among the doped films, the Pt-doped film with low Pt concentration was most suitable from a practical perspective.
